Thiết bị điều khiển lưu lượng khí
- Mã sản phẩm: 3-6947-04
- Quy cách (Đóng gói): 1 piece
- Giá nhà sản xuất: 22,720,000 ¥
Đặc tính và thông số kỹ thuật
Model number: C1020-4S2-20L-He
Flow rate (SLM): 20
Gas: He
Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 – 35℃)
Reproducibility: +/- 0.2% FS
Flow rate control range: 5 – 100% FS
Fluid: Gas
Available temperature: 5 – 50℃ 85%RH or less
Responsiveness: 6sec
Operation pressure range: 50 – 300kPa
Pressure resistance: 1MPa (G)
External leak rate: 1 x 10 – 7Pa, m3/sec (He) or less
Gas contact unit material: Stainless Steel (SUS316), PTFE, fluorine Rubber
Surface treatment: Mechanical processing finish
Fittings: Equivalent to 1/4in.SWL
Input and output: Analog signal (0 – 5VDC)
Valve type: N/O normal open
Drive power: +15VDC +/- 5% 60mA, -15VDC +/- 5% 150mA
Communication system: Analog 0 – 5VDC (D-Sub9Pin connector)
Size: 160 x 33.6 x 105mm
