Thiết bị điều khiển lưu lượng khí
- Mã sản phẩm: 3-5069-04
- Quy cách (Đóng gói): 1 piece
- Giá nhà sản xuất: 15,074,000 ¥
Đặc tính và thông số kỹ thuật
Model number: C1005
Full scale flow rate – gas type: 500SCCM-He
Gas type: He
Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 – 35℃)
Responsiveness: 6sec
Flow rate control range: 5 – 100% FS
Input and output: Analog signal (0 – 5VDC)
Valve type: N/O normal open
Reproducibility: +/- 0.2% FS
Operation pressure range: 50 – 300kPa
Pressure resistance: 1MPa (G)
External leak rate: 1 x 10 – 7Pa, m3/sec (He) or less
Gas contact unit material: Stainless Steel (SUS316), PTFE, Fluorine rubber
Connection: Equivalent to 1/4in.SWL
Power supply: + 15VDC +/- 5% 60mA, – 15VDC +/- 5% 150mA
Communication system: Analog 0 – 5VDC (D-Sub9Pin connector)
Size: 127 x 25.5 x 100mm
